AFM Microcantilevers Used As Sensors For Monitoring Humidity (Microeletronic Engineering).

Atomic force microscope microcantilevers used as sensors for monitoring humidity C. Steffens a,b,⇑ , A. Manzoli b , F.L. Leite a,c , O. Fatibello a,d , P.S.P. Herrmann a,b a Department of Biotechnology, Federal University de São Carlos (UFSCar), SP... More

Atomic force microscope microcantilevers used as sensors for monitoring humidity C. Steffens a,b,⇑ , A. Manzoli b , F.L. Leite a,c , O. Fatibello a,d , P.S.P. Herrmann a,b a Department of Biotechnology, Federal University de São Carlos (UFSCar), SP 13565-905, Brazil b National Nanotechnology Laboratory for Agribusiness, Embrapa Instrumentation, São Carlos, SP 13560-970, Brazil c Department of Physics Mathematics and Chemistry (DFMQ), Federal University of São Carlos (UFSCar), Sorocaba, SP 18052-780, Brazil d Department of Chemistry, Federal University of São Carlos (UFSCar), São Carlos, SP 13565-905, Brazil a r t i c l e i n f o Article history: Received 20 January 2013 Received in revised form 8 July 2013 Accepted 23 July 2013 Available online 2 August 2013 Keywords: Microcantilever sensor Humidity Polyaniline Sensitivity a b s t r a c t A microcantilever sensor is presented. Functionalization of the cantilever with a polyaniline (PANI) sensitive layer and its use as a humidity sensor Less