LT-GaAs
We offer LT-GaAs for THz or detector and other application.
2" LT-GaAs Wafer Specification:
Item Specifications
Diamater(mm) Ф 50.8mm ± 1mm
Thickness 1-2um or 2-3um
Marco Defect Density ≤ 5 cm-2
Resistivity(300K) >108 Ohm-cm
Carrier <0.5ps...
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LT-GaAs
We offer LT-GaAs for THz or detector and other application.
2" LT-GaAs Wafer Specification:
Item Specifications
Diamater(mm) Ф 50.8mm ± 1mm
Thickness 1-2um or 2-3um
Marco Defect Density ≤ 5 cm-2
Resistivity(300K) >108 Ohm-cm
Carrier <0.5ps
Dislocation Density <1x106cm-2
Useable Surface Area ≥80%
Polishing Single side polished
Substrate GaAs substrate
Other conditions:
1) GaAs substrate should be undoped/semi-insulating with (100)orientation.
2) Growth temperature: ~ 200-250 C
Annealed for ~ 10 minutes at 600 C after growth
LT-GaAs Introduction:
Low-temperature grown GaAs is the most widely used material for the fabrication of photoconductive THz emitters or detectors.
Its unique properties are good carrier mobility, high dark resistivity, and subpicosecond carrier lifetimes.
GaAs grown by molecular beam epitaxy (MBE) at temperatures lower than 300 °C (LT GaAs) presents a 1%–2% arsenic
excess which depends on the growth temperature Tgand on the arsenic pressure during the deposi
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